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Angle-resolved XRF

For angle-resolved XRF the eincidence or emission angle are varied resulting in a depth profile for stratified samples.
Lupe [1]

Typical absorption length for X-radiation in solid materials are in the micrometer regime and above. Thus, non-destructive elemental distribution analysis with X-rays, e.g. in a confocal setup (LINK) is likewise limited to the micrometer scale.

The key idea of the so-called angle-resolved XRF technique is the fine tuning of either the incidence angle (Grazing Incidence X-ray Fluorescence: GIXRF [2]) or detection angle (Grazing Emission X-ray Fluorescence: GEXRF [3]) of the X-radiation (Fig. 1). However, for each angle the detected elemental information still originates from an integral detection volume with varying maximum depth, preventing the direct assignment of depth regions to applied angle. Thus, the actual elemental depth distribution must be calculated by simulating a model of the sample and fitting the sample parameters, necessitating the precise knowledge of the setup.


contact: Jonas Baumann, Ioanna Mantouvalou


Relevant publications: Veronika Szwedowski-Rammert,  Jonas Baumann,  Christopher Schlesiger,  Ulrich Waldschlaeger,  Armin Gross,  Birgit Kanngießer  and  Ioanna Mantouvalou, Laboratory based GIXRF and GEXRF spectrometers for multilayer investigations,  J. Anal. At. Spectrom. 2019, DOI: 10.1039/C8JA00427G

Jonas Baumann, Richard Gnewkow, Steffen Staeck, Veronika Szwedowski-Rammert, Christopher Schlesiger, Ioanna Mantouvalou and Birgit Kanngießer, Photon event evaluation for conventional pixelated detectors in energy-dispersive X-ray applications, J. Anal. At. Spectrom. 2018, Advance Article, DOI: 10.1039/c8ja00212f

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