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TU Berlin

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XRF system for the analysis of thin layers

The instrument offers the possibility for qualitative and quantitative elemental investigation with XRF of unknown samples. The quantification of layered samples is possible.


research project: elemental imaging with (confocal) micro-XRF

Rh microfocus X-ray tube, 50 kV, 600 µA
4 different collimators, 5 filters
optical microscope with motorized table for alignment

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